Математичне моделювання концентраційних розподілів багатошарових наноплівок оксидної структури

Abstract

Побудовано математичну модель дифузійного перенесення в неоднорідних багатошарових середовищах, що описує процес формування мультишарів тонких оксидних наноплівок. Отримано просторово-розподілені концентраційні розподіли структурних складових компонентів наноплівок для різних технологічних зрізів та часових тривалостей формування технологічного мультишару наноплівки.

Development of modern technologies that integrate a miniaturized physical systems has stimulated a large number of papers on the study of the kinetics of masstransfer processes in multilayer nanofilms that are used in the resource-saving technologies. Alloys of iron-chromium systems are used as a construction material in nuclear engineering while manufacturing mineral fibers. Oxides, multi-layer in particular, are widely used in semiconductor engineering. Chemical composition of oxides is determined by the components such as Cr, Al, Si, Rare-earth metals. If Al content is increased to 3 %, the heat resistance of the alloy dramatically increases, since the formation of the external aluminum oxide prevents the penetration of oxygen into the inner layers. Determination of diffusion characteristics allows to correct the chemical composition of alloys and predict operating life. The mathematical model of diffusion transferance in heterogeneous environments that describes the process of forming thin oxide nano films multilayers used as termo- and aggressive-protective coverings of the technological equipment operating units in highly corrosive environments have been constructed. Spatially distributed concentration distributions of nanofilm structural components (aluminium, silicon) for various technological shears of oxide nanofilm and time durations of forming the technological nanofilm multilayer have been obtained in the result of modeling. The results can be used to encrease the efficiency of experimental researches of transferance in multicomponental polycompositions and in researching of new nanomaterials properties.